| 2nd International Workshop on Piezoelectric MEMS. Workshops: September 6-7, 2011 at EPFL - Lausanne - Switzerland We observe an increasing worldwide interest in piezoelectric thin film MEMS devices. Still great efforts are needed to establish reproducible processing routes, reliable integration, optimal poling procedures, standards in characterization methods, optimal device design, and reproducible operation conditions. After the success of the first workshop in 2010 at Aachen, we aim at bringing together again researchers and engineers from industry and academia to report and discuss on progress in in the field, and stimulate exchange on experience and possible cooperation. A combination of presentations and discussions will give experts and researchers the chance to boost this promising and quickly developing market. In addition, the workshop will be a great opportunity for companies working in MEMS or using MEMS to learn about the state of the art in piezoMEMS based on ferroelectric and non-ferroelectric piezoelectric thin films. The following topics will be addressed by invited oral presentations from experts in the field: -Piezoelectric thin film synthesis & properties -Integration -Testing and instrumentation -Applications -Cooperative European projects To register go to the website: http://www.piezomems2011.org/index.html |
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